Mechanical Booster Pump PRC-A/PMB-C(M) Series
Stable performance can be achieved even against vapors such as water vapor and solvents. 【ULVAC】
By combining with dry pumps, oil-sealed rotary vacuum pumps, water-sealed pumps, etc., it is possible to increase the exhaust speed in the range of 10,000 to 0.1 Pa, where the exhaust speed of the roughing pump decreases. The PRC-A series, like the PMB-C(M), is designed primarily for use in semiconductor and liquid crystal manufacturing processes that require cleanliness both inside and outside the pump, as well as for general-purpose applications. The PMB-040C and PMB-060C are optimal for large capacity exhaust in thermal treatment furnaces, melting furnaces, and large film deposition equipment. 【Product Lineup】 ○PMB-001C, CM ○PMB-003C, CM ○PRC-003A ○PRC-006A ○PRC-012A For more details, please contact us or download the catalog.
- 企業：アルバック／ULVAC, Inc.
- 価格：Other
